Applied Micro & Nanosystems Facility

The Applied Micro & Nanosystems Facility (AMNF) is a class 100 clean room facility idealy suited for microelectromechanical systems fabrication. Instrumentation includes thin film deposition system, photolithography, surface measurements, chemcial processing, electronic prototyping and laser micromilling. All users will require a site orientation followed by training on each piece of equipment. To book an orientation please put a ticket in through the Technical Support Group Ticket System. Further information can be found in the Operation and Safety Protocols document for the AMNF facility.